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PI is a leading manufacturer of precision motion control and automation systems, hexapod 6-axis parallel robotic stages, air bearing motion systems, Gantry Systems, 3D printing, laser machining, and piezoelectric nano-positioning solutions. Applications include photonics, semiconductor technology, medical engineering, assembly, inspection,

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How Does a MagLev Stage (Magnetic Levitation) provide Nanometer Precision Motion?

POSTED 06/07/2019

Magnetic levitation stages provide similar precision motion performance to air bearing positioners but have additional advantages. The PIMag 6D is a design concept for multi-axis nanopositioning applications where the highest precision is required, e.g. in semiconductor processing and inspection systems. This novel precision positioning system is based on magnetic levitation: The completely passive platform levitates on a magnetic field, which actively positions and also guides it.