Miniaturized Fast Steering Mirror Mount Platforms (FSM) for Laser Beam Control are Piezo-based

PI’s new small laser steering platform stages find use in microscopy, semiconductor beam delivery, optics, and photonics.

PI (Physik Instrumente), a global leader in the field of piezo technology and precision motion systems and solutions, broadens its portfolio of piezo steering mirrors. With milli-second response and settling time and high dynamic linearity, the new S-335 fast steering mirror (FSM) platforms are ideal for precision image processing and image stabilization, laser beam steering, materials processing, and lithography.

2-Axis, Frictionless Guiding, No Polarization Rotation
S-335 steering mirror platforms provide precise angular tip/tilt motion of the top platform around two orthogonal axes. These flexure-guided, electro-ceramic driven systems can provide higher accelerations than other actuators, enabling step response times in the sub-millisecond range, with frictionless backlash-free motion. The single pivot-point design also prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems, e.g. galvo scanners.
 
Long Ranges with Integrated Motion Amplifier
Integrated EDM flexure based motion amplifiers provide an industry-leading tip/tilt angle up to 35mrad, equal to an optical deflection angle of 70mrad (4°). ID chip support allows for fast start-up and a simple data exchange between tip/tilt platforms and controllers.

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Parallel-Kinematics: Smaller with Improved Stability, Linearity & Dynamics
PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. The advantage is jitter-free, multi-axis motion with excellent temperature stability. Compared to stacked (two-stage) mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes with faster response and better linearity in a smaller package.

Specifications, Datasheet, More Information >
Kinematic Piezo Mirror Mounts and Fast Steering Mirror Mount Platforms

Precision Motorized Kinematic Mirror Mounts
Additional information on long travel 2-axis motorized kinematic mirror mounts with high precision piezo motors.