Miniaturized Fast Steering Mirror Platforms (FSM) for Laser Beam Control are Piezo-based
PI’s new small steering stages find use in microscopy, semiconductor manufacture, optics, and photonics.
Auburn, MA – PI (Physik Instrumente), leader in the field of piezo technology and precision motion systems and solutions, broadens its portfolio of piezo steering mirrors. With milli-second response and settling time and high dynamic linearity, the new S-335 fast steering mirror (FSM) platforms are ideal for precision image processing and image stabilization, laser beam steering, materials processing, and lithography.
2-Axis, Frictionless Guiding, No Polarization Rotation
S-335 steering mirror platforms provide precise angular tip/tilt motion of the top platform around two orthogonal axes. These flexure-guided, electro-ceramic driven systems can provide higher accelerations than other actuators, enabling step response times in the sub-millisecond range, with frictionless backlash-free motion. The single pivot-point design also prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems, e.g. galvo scanners.
Long Ranges with Integrated Motion Amplifier
Integrated EDM flexure based motion amplifiers provide an industry-leading tip/tilt angle up to 35mrad, equal to an optical deflection angle of 70mrad (4°). ID chip support allows for fast start-up and a simple data exchange between tip/tilt platforms and controllers.
Parallel-Kinematics: Smaller with Improved Stability, Linearity & Dynamics
PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. The advantage is jitter-free, multi-axis motion with excellent temperature stability. Compared to stacked (two-stage) mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes with faster response and better linearity in a smaller package.
Specifications, Datasheet, More Information >
Standard and Custom
PI has over 4 decades of experience providing in-house engineered precision motion control solutions, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the customer’s application.
PI is a leading manufacturer of air bearing stages, piezoelectric solutions, precision motion control equipment, and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. The PI group employs more than 1,000 people worldwide in 15 subsidiaries and R&D / engineering centers on 3 continents.