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PI is a leading manufacturer of precision motion control and automation systems, hexapod 6-axis parallel robotic stages, air bearing motion systems, Gantry Systems, 3D printing, laser machining, and piezoelectric nano-positioning solutions. Applications include photonics, semiconductor technology, medical engineering, assembly, inspection,

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Air Bearings How do they work? Example XY Air Bearing Stage: PIglide HS www.pi.ws

POSTED 06/11/2019

Air Bearings: How do they work? Air bearings provide very smooth and accurate motion. They can be used in linear and rotary motion systems. XY-Stages with the highest motion fidelity are based on a planar air bearing design driven by linear motors. Air bearing stages provide extremely straight and flat XY motion. Air bearing stages are used wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection.


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