The rodless linear module actuators are fully assembled and tested and provide high resolution with 0.1µm minimum incremental motion. The high-performance, cog-free 3-phase linear motors provide excellent dynamic performance, high speed up to 5m/sec and high acceleration up to 5g with short settling times. Integrated optical linear position sensors measure down to 1 nanometer increments.
Applications
Electronic parts assembly: sensor, camera, and optics assembly. Noncontact optical inspection, X-ray inspection, and AOI (automated optical inspection). Sensor and ultrasonic tests. Semiconductor manufacturing: wafer processing and inspection. Laser processing and machining: precision laser welding. Highly dynamic applications in precision automation, where smooth scanning motion, minimum tracking errors, and short settling times are required.
Long travel ranges (to 1200 mm) with narrow profile (132 mm width)
Permanent load capacity to 1000 N
Highly dynamic, maintenance-free linear motor with velocities up to 5 m/s
Robust industrial design for a long lifetime
High-precision incremental or absolute linear encoder
Ideal for gantry systems
Active axes |
X |
X |
X |
X |
|
Travel range in X |
400 mm |
400 mm |
800 mm |
800 mm |
|
Acceleration in X, unloaded |
50 m/s² |
50 m/s² |
50 m/s² |
50 m/s² |
max. |
Maximum velocity in X, unloaded |
5000 mm/s |
5000 mm/s |
5000 mm/s |
5000 mm/s |
|
Straightness (Linear crosstalk in Y with motion in X) |
± 12 µm |
± 12 µm |
± 20 µm |
± 20 µm |
max. |
Flatness (Linear crosstalk in Z with motion in X) |
± 10 µm |
± 10 µm |
± 10 µm |
± 10 µm |
max. |
Pitch (Rotational crosstalk in θY with motion in X) |
± 100 µrad |
± 100 µrad |
± 150 µrad |
± 150 µrad |
max. |
Yaw (Rotational crosstalk in θZ with motion in X) |
± 150 µrad |