PI (Physik Instrumente) LP Product

High Speed Linear Module, Direct Drive, High Performance Actuators

Model: V855 / V857

PI (Physik Instrumente) LP

PI introduces two new affordable direct-drive linear modules that can be operated as high load stages or linear actuators.

Image of High Speed Linear Module, Direct Drive, High Performance Actuators
Economical high speed, high precision, linear modules, linear actuators and linear slides with maintenance-free direct drive motors, for OEMs in industrial motion control, assembly and optical inspection. applications -

The rodless linear module actuators are fully assembled and tested and provide high resolution with 0.1µm minimum incremental motion. The high-performance, cog-free 3-phase linear motors provide excellent dynamic performance, high speed up to 5m/sec and high acceleration up to 5g with short settling times. Integrated optical linear position sensors measure down to 1 nanometer increments.

Applications

Electronic parts assembly: sensor, camera, and optics assembly. Noncontact optical inspection, X-ray inspection, and AOI (automated optical inspection). Sensor and ultrasonic tests. Semiconductor manufacturing: wafer processing and inspection. Laser processing and machining: precision laser welding. Highly dynamic applications in precision automation, where smooth scanning motion, minimum tracking errors, and short settling times are required.

 

    Long travel ranges (to 1200 mm) with narrow profile (132 mm width)
    Permanent load capacity to 1000 N
    Highly dynamic, maintenance-free linear motor with velocities up to 5 m/s
    Robust industrial design for a long lifetime
    High-precision incremental or absolute linear encoder
    Ideal for gantry systems

 

Active axes X X X X  
Travel range in X 400 mm 400 mm 800 mm 800 mm  
Acceleration in X, unloaded 50 m/s² 50 m/s² 50 m/s² 50 m/s² max.
Maximum velocity in X, unloaded 5000 mm/s 5000 mm/s 5000 mm/s 5000 mm/s  
Straightness (Linear crosstalk in Y with motion in X) ± 12 µm ± 12 µm ± 20 µm ± 20 µm max.
Flatness (Linear crosstalk in Z with motion in X) ± 10 µm ± 10 µm ± 10 µm ± 10 µm max.
Pitch (Rotational crosstalk in θY with motion in X) ± 100 µrad ± 100 µrad ± 150 µrad ± 150 µrad max.
Yaw (Rotational crosstalk in θZ with motion in X) ± 150 µrad
High Speed Linear Modules, Linear Actuators with Linear Motors, Direct Drive for Industrial Assembly, Automation, Metrology, Inspection

Other Products from PI (Physik Instrumente) LP

Linear Stage, Miniature Positioning Stage, Motorized Image

Linear Stage, Miniature Positioning Stage, Motorized

L-408 PI Motorized Miniature Linear Stage, Precision Positioning Stage

Wafer Stages for Glass Substrate Inspection and Semiconductor Metrology Image

Wafer Stages for Glass Substrate Inspection and Semiconductor Metrology

High precision, engineered motion systems for semiconductor metrology and the automation, inspection and lithography applications.