RVSI Ships Wafer Inspection System to Taiwan Assembly House

CANTON, MASSACHUSETTS - October 22, 2001 - Robotic Vision Systems, Inc. (RVSI) (Nasdaq: ROBV) today said it has shipped a WS-1000 Wafer Inspection System to a prominent Taiwan-based semiconductor assembly house.

"We are now approaching twenty WS-series installations since introducing the product," said Frank L. Jacovino, General Manager of Wafer Level Products at the Electronics Division of RVSI in Hauppauge, New York. "With each sale, RVSI further establishes its leadership in this emerging market. We provide the semiconductor industry with an unmatched array of bumped wafer inspection products."

Rather than traditional wire bonds, the newest generation of integrated circuits utilizes microscopic-sized solder or gold "bumps" that are directly deposited on the wafer for electrical connections. RVSI's WS-series improves yield management of bumped wafers and flip chip die, providing a method to maximize yields and profitability by inspecting bump parameters at high production rates. The system's capabilities include inspection of pre-reflow and post-reflow solder bumps and multi-process gold bumps. The WS-1000 is designed to handle the industry's standard 200mm wafers and performs 3-D inspection only.  Such systems are priced at approximately $500,000.

"Each of our shipments, including this most recent one, represents a competitive win for RVSI against the newest technology offered by other companies," said Michael Gray, Vice President of Sales at the Electronics Division of RVSI in Hauppauge, New York. " Our understanding of 3-D inspection is the result of ten years of service to the semiconductor industry; each new order we receive is a vote by the market in favor of our technological approach to bumped wafer inspection.

"Our 3-D laser technology utilized by MicroMap technology, with its inherent adaptability to measure any surface feature, allows the WS Series systems to inspect a broad variety of electrical interconnects - ; from solder or gold bumps to micro-spring wires - with unparalleled speed and accuracy," Mr. Gray said.

About RVSI
Robotic Vision Systems, Inc. (RVSI) (Nasdaq: ROBV) has the most comprehensive line of machine vision systems available today. Headquartered in Canton, Massachusetts, with offices worldwide, RVSI is the world leader in vision-based semiconductor inspection and media transfer equipment. Using leading-edge technology, RVSI joins vision-enabled process equipment, high- performance optics, lighting, and advanced hardware and software to assure product quality, identify and track parts, control manufacturing processes, and ultimately enhance profits for companies worldwide. Serving the semiconductor, electronics, aerospace, automotive, pharmaceutical and packaging industries, RVSI holds approximately 100 patents in a broad range of technologies.

Forward Looking Statement
Except for the historical information herein, certain matters discussed in this release include forward-looking statements that may involve a number of risks and uncertainties. Actual results may vary significantly based on a number of factors, including, but not limited to: the historical cyclical nature of the semiconductor industry, risks in products and technology development, market acceptance of new products and continuing product demand, the impact of competitive products and pricing, changing economic conditions, both here and abroad, timely development and release of new products, strategic suppliers and customers, the effect of the company's accounting policies and other risk factors detailed in the Company's most recent registration statement, annual report on Form 10-K and 10K/A, and other filings with the Securities and Exchange Commission.

RVSI
5 Shawmut Road
Canton, MA  02021
Tel: 781-302-2439  Fax: 781-302-2440

For further information contact:
Neal H. Sanders (781) 302-2439
For release: October 22, 2001 at 8:00 a.m.