RVSI Receives Order for LS-110 Laser Scanning Development System

RVSI now has tools for 3-D inspection of semiconductors at three crucial stages of the manufacturing and assembly process

CANTON, MASSACHUSETTS - October 15, 2001 - Robotic Vision Systems, Inc. (RVSI) (NASDAQ:ROBV) today said it has sold an LS-110 Laser Scanning Development System to a Taiwan-based semiconductor industry subcontractor to be used in the inspection of integrated circuit substrates.  The LS-110 is an extension of RVSI's industry-leading LS series of 3-D inspection systems. With the introduction of the LS-110 in July, RVSI now provides 3-D inspection of semiconductors at three crucial stages of the manufacturing process where metrology is of paramount concern.  The company's LS-7700 is the most current generation of system for the inspection of assembled semiconductor packages.  RVSI's WS-family of inspection tools facilitates wafer-level inspection of flip chip and bumped wafers.  Now, the LS-110 brings RVSI's 3-D expertise to substrate inspection.  Substrate applications include measurement of bump volume, height, area and position, quality assurance of bumps after test, and aiding in development of emerging technologies. In addition, the LS-110 integrates 2-D inspection capabilities for finding foreign material and package defects on the substrate.

"Our first sale and installation of an LS-110 earlier this year at a major semiconductor manufacturer led directly to the identification of an opportunity in substrate inspection," said Michael Gray, Vice President of Sales at the Electronics Division of RVSI.  "In addition to being an automated tool for product development engineers working with semiconductor array-based packages and substrates, the LS-110 is ideally suited for the inspection of critical substrates used in conjunction with high-performance semiconductors.  These substrates require an inspection that goes beyond the capability of the camera-based devices currently available.  As a result, subcontractors were performing these inspections manually, with microscopes and magnifying glasses.  The LS-110 allows the process to be automated and accelerated while improving the precision and accuracy of the inspection."

Employing RVSI's patented MicroMap™ laser technology, the LS-110 provides revolutionary levels of 3-D inspection, acquiring several thousand surface profiles per second without relying on any moving parts inside the laser sensor. The compact design of the LS-110 is easily deployed at many semiconductor and electronics manufacturing process steps.

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About RVSI
Robotic Vision Systems, Inc. (RVSI) (NASDAQ: ROBV) has the most comprehensive line of machine vision systems available today.  Headquartered in Canton, Massachusetts, with offices worldwide, RVSI is the world leader in vision-based semiconductor inspection and media transfer equipment. Using leading-edge technology, RVSI joins vision-enabled process equipment, high-performance optics, lighting, and advanced hardware and software to assure product quality, identify and track parts, control manufacturing processes, and ultimately enhance profits for companies worldwide.  Serving the semiconductor, electronics, aerospace, automotive, pharmaceutical and packaging industries, RVSI holds approximately 100 patents in a broad range of technologies.

Forward Looking Statements
Except for the historical information herein, certain matters discussed in this release include forward-looking statements that may involve a number of risks and uncertainties. Actual results may vary significantly based on a number of factors, including, but not limited to the historical cyclical nature of the semiconductor industry, risks in products and technology development, market acceptance of new products and continuing product demand, the impact of competitive products and pricing, changing economic conditions, both here and abroad, timely development and release of new products, strategic suppliers and customers, the effect of the company's accounting policies and other risk factors detailed in the Company's most recent registration statement, annual report on Form 10-K and 10K/A, and other filings with the Securities and Exchange Commission.

RVSI
5 Shawmut Road
Canton, MA  02021
Tel: 781-302-2439  Fax: 781-302-2440

For further information contact:
Neal H. Sanders
(781) 302.2439