RVSI Gets Order for 3-D Wafer Inspection System

Canton, Massachusetts - June 6, 2002 - Robotic Vision Systems, Inc. (RVSI) (Nasdaq: ROBV) today said it has received an order for a WS-series bumped wafer inspection system from one of the world's largest suppliers of materials for ball-grid-array semiconductors.  The system will be used for three-dimensional defect inspection of semiconductor wafers at the company's Japan technical and customer demonstration center.

'This order represents one of the highest-profile competitive wins in the history of the product line,' said Michael Gray, the Semiconductor Equipment Group's Vice President of Sales.' The system has been purchased by a Japanese company that has a dominant position in the supply of BGA balls to semiconductor packaging companies.  That company now seeks to extend its leadership to the relatively new market for wafer bumps.  Our WS-series will be used both to monitor technical process development, and to visually show customers how ball placement is accomplished on wafers.

'The application is tailor-made for our MicroMap™ technology which provides the kinds of 2-D and 3-D output that can be appreciated by a broad cross-section of technical staff,' Mr. Gray said.  'We expect our system and its capabilities will be seen by the decision makers at virtually every organization that is or will be involved in bumped wafer production.  In placing the order, the customer told us that our WS-series system was the only product that could deliver 3-D bump height metrology at production speed.  We believe this message about the superiority of our system will be conveyed to those decision makers, and especially to those in Japan who are just entering the market.'

Rather than traditional wire bonds, the newest generation of integrated circuits utilizes microscopic-sized solder or gold 'bumps' that are directly deposited on the wafer for electrical connections. RVSI's WS-series improves yield management of bumped wafers and flip chip die, providing a method to maximize yields and profitability by performing surface defect inspection of the wafer and inspecting bump parameters at high production rates. The system's capabilities include inspection of pre-reflow and post-reflow solder bumps and multi-process gold bumps, as well as wafer surface defects. Depending upon wafer size and other features, the WS-series is priced from $500,000 to $1 million per system.

Certified System Integrator Program

Set Yourself at the Forefront of the Global Vision Market

Vision system integrators certified by A3 are acknowledged globally throughout the industry as an elite group of accomplished, highly skilled and trusted professionals. You’ll be able to leverage your certification to enhance your competitiveness and expand your opportunities.

GET CERTIFIED

About RVSI
Robotic Vision Systems, Inc. (RVSI) (NASDAQ:ROBV) has the most comprehensive line of machine vision systems available today. Headquartered in Canton, Massachusetts, with offices worldwide, RVSI is the world leader in vision-based semiconductor inspection and media transfer equipment. Using leading-edge technology, RVSI joins vision-enabled process equipment, high-performance optics, lighting, and advanced hardware and software to assure product quality, identify and track parts, control manufacturing processes, and ultimately enhance profits for companies worldwide. Serving the semiconductor, electronics, aerospace, automotive, and pharmaceutical industries, RVSI holds approximately 100 patents in a broad range of technologies.

Forward Looking Statement
Except for the historical information herein, certain matters discussed in this release include forward-looking statements that may involve a number of risks and uncertainties. Actual results may vary significantly based on a number of factors, including, but not limited to: the historical cyclical nature of the semiconductor industry, risks in products and technology development, market acceptance of new products and continuing product demand, the impact of competitive products and pricing, changing economic conditions, both here and abroad, timely development and release of new products, strategic suppliers and customers, the effect of the company's accounting policies and other risk factors detailed in the Company's most recent registration statement, annual report on Form 10-K and 10K/A, and other filings with the Securities and Exchange Commission.

Contact:
RVSI
5 Shawmut Road
Canton, MA  02021
Tel: 781-302-2439  Fax: 781-302-2440