Tecnotion Product
Member Since 2017
As supplier of linear and torque motors we provide specialized motor technology and integration in customers motion solutions. Tecnotion direct drive motors are seamless integrated in a wide range of applications. We direct drive your motion technology!
Product filed under:
Integrated Motors, Linear Motors, and Magnets Integrated Motors, Linear Motors, Magnets, Motor Components, Motors, and Motors & Drives
See More
High acceleration and dynamics.
Generation 2 vacuum ironless linear motor series is designed with the unique challenges of vacuum applications in mind and based on years of collaboration with high-end semiconductor manufacturers. The portfolio is suitable for even the strictest vacuum requirements with a large force range.
The Vacuum ULV – G2 series is the medium-size series in the high-end vacuum-rated linear motor series. They are commonly used for applications demanding peak force or low heat output. Such as in lithography and inspection solutions. In longer strokes, ULV – G2 coils can be combined to save magnet material but still achieve high performance.
KEY INDUSTRIES THAT CAN BENEFIT FROM THESE MOTORS ARE, FOR INSTANCE:
- Semiconductor
- Flat Panel Display
- Inspection stages
- Lithography
- E-beam / ion beam applications
SO WHY CHOOSE FOR IRONLESS VACUUM RATED?
- Defined low outgassing
- No particulation
- High cleanliness
- No large cable feed-through required
- Can be positioned anywhere in the vacuum chamber.
.jpg)
Other Products from Tecnotion
Iron core motor TxX series
The TxX Series features stronger magnet plates, allowing for a compact motor design that takes up less space