Tecnotion Product

ULV – Vacuum G2 series

Model: ULV Series G2

Tecnotion

High acceleration and dynamics.

Image of ULV – Vacuum G2 series

Generation 2 vacuum ironless linear motor series is designed with the unique challenges of vacuum applications in mind and based on years of collaboration with high-end semiconductor manufacturers. The portfolio is suitable for even the strictest vacuum requirements with a large force range.

The Vacuum ULV – G2 series is the medium-size series in the high-end vacuum-rated linear motor series. They are commonly used for applications demanding peak force or low heat output. Such as in lithography and inspection solutions. In longer strokes, ULV – G2 coils can be combined to save magnet material but still achieve high performance.

KEY INDUSTRIES THAT CAN BENEFIT FROM THESE MOTORS ARE, FOR INSTANCE:

  • Semiconductor
  • Flat Panel Display
  • Inspection stages
  • Lithography
  • E-beam / ion beam applications

SO WHY CHOOSE FOR IRONLESS VACUUM RATED?

  • Defined low outgassing
  • No particulation
  • High cleanliness
  • No large cable feed-through required 
  • Can be positioned anywhere in the vacuum chamber.
  • Coil-Unit

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