PI (Physik Instrumente) LP Product
Mini Hexapod 6-Axis Positioner with Many Options: Dynamic, Vacuum, High Resolution
Model: H-811
- Miniature Hexapod, with Different Configurations: Standard, High-Speed, Vacuum, High Resolution
- Complete with Custom Hexapod Controller and Software
- Travel Ranges 34 x 32 x 13 mm, Rotation to 42 Degrees
- Load Capacity to 5 kg
- Actuator Resolution to 5 nanometers (High Resolution Version)
- Repeatability up to ±0.2 microns
- Velocity to 25 mm/second
Other Products from PI (Physik Instrumente) LP
Fiber Alignment Stage, Fast Multi-Channel Photonics Alignment engine (FMPA)
for Silicon Photonics, Fiber Alignment Stage, Fast Photonics Alignment engine, FMPA
Wafer Stages for Glass Substrate Inspection and Semiconductor Metrology
High precision, engineered motion systems for semiconductor metrology and the automation, inspection and lithography applications.


