Precision Rotary Table, Direct Drive, Air Bearings, Aperture

Air Bearing Rotary Table Introduction

High precision air bearing rotary tables provide excellent properties in metrology applications of parts from miniature size to large weight.  Air bearings are ideal for the most demanding applications because they guarantee absolute repeatability, ultra-smooth motion and  sub-microradian accuracy.  PI air bearing rotary tables are designed and manufactured by our teams in Hopkinton MA and Nahua, NH to extremely tight geometric tolerances, with state of the art equiopment.  The lack of friction and drag, as inherent in mechanical rotary bearings provides for the highest performance combined wiht the highest reliability.

R-Theta Stage applications for Semiconductor Test / Metrology and Laser Processing

Air bearing rotary stages are also ideal for R-Theta 2-Axis Stage systems, enabling higher throuput than conventioal Cartesian XY linear stage systems.

Air Bearing Rotary Tables provide Maintenance-Free Nanopositioning Performance

The A-688 rotary table with direct drive torque motor provides the highest precision,  resolution and geometric performance. The angular resolution is 0.0015µrad (0.00003 arcsec), and flatness and eccentricity are specified better than 175 nanometers and 300 nanometers respectively. This is made possible by high resolution, absolute measuring feedback encoders, high performance closed-loop controllers, and low-cogging frameless and slotless torque motors. The A-688 air bearing rotary table can be used in any orientation and with no wear, required maintenance or lubrication, has a virtually unlimited life.

Air Bearing Rotary Table Specs, Rotary Tables Datasheet

Video: R-Theta Stages based on linear air bearing tables and rotary air
bearing trables are ideal for Semiconductor and Laser Processing applications.

 PI USA, is a premium supplier of in-house designed and manufactured air bearings for precision motion, metrology and automation.