Rotary Table, Direct Drive, Low-profile, Air Bearings

Several low profile air bearing rotary tables have been added to PI's portfolio.  The lartest family member is now the A-638 rotary table and the smallest one is the A-634 covering table diameters from 150mm to 350mm. These Air bearing low-profile rotary tables have no rolling or sliding elements and deliver frictionless, non-contact motion, resulting in negligible reversal error, better wobble, eccentricity and velocity stability – ideal prerequisites for high-end industrial applications such as inspection, metrology, calibration, and scanning, including cleanroom environments.

R-Theta Stage applications for Semiconductor Test / Metrology and Laser Processing

Air bearing rotary stages are also ideal for R-Theta 2-Axis Stage systems, enabling higher throuput than conventioal Cartesian XY linear stage systems.

Applications include:  Optics, Automation, Metrology,  Precision motion control for semiconductor test and manufacturing.

High Speed, High Precision, Excellent Geometric Precision
The A-634 to A-638 rotary table family offers superior accuracy, flatness, and wobble performance, with 50nm Flatness, ±50nm Eccentricity, 1µmrad Wobble.

Direct drive 3-phase, torque motors based on low-cogging slotless designs can achieve rotary speed up to 500rpm.   High resolution absolute optical encoders, allow closed-loop motion cotrol for resolution as high as 0.0015µrad . Geometric performance is also excellent with 50nm flatness, ±50nm radial runout and 1µrad wobble.

More Information on Low Profile, Direct Drive Air Bearing Rotary Tables

Video: R-Theta Stages based on linear air bearing tables and rotary air
bearing trables are ideal for Semiconductor and Laser Processing applications.

 PI USA, is a premium supplier of in-house designed and manufactured air bearings for precision motion, metrology and automation.