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5-Axis Wafer Stage for Semiconductor Processing, Multi-Axis Air Bearing
Learn more More on Multi-Axis Positioning and Automation Systems:
The 5-axis wafer stage by air bearing manufacturer and supplier P I USA provides the precision and performance required in semiconductor front-end/back-end processes (wafer processing operation and assembly process). Its low profile design allows for easy integration.
Applications of the 5-axis air bearing stage include:
Multi-Axis indexing, positioning
Wafer/substrate test and inspection
Scanning, metrology
ACS based alignment solutions for production test and packaging needs
Direct-write lithography
µLED fabrication
Clean room applications
The multi-axis nanopositioning system is based on an A-311 planar XY-air bearing stage with long travel range up to 300mm and a special low-profile 3-axis Z-Tip-Tilt stage. The multi-axis positioning stage is operated by an idustrial 6-axis high precision motion controller.
September 23-24, 2026 | Santa Clara, CA
The 5-axis system in motion can be seen in this video at the SPIE 2022 Photonics West Conference.
See more multi-axis nanopositioning products for semiconductor manufacturing.
Additional information on 4-axis Wafer Stages for Wafer and Substrate Inspection
PI (Physik Instrumente) LP
PI is a leading manufacturer of precision motion control and automation systems, hexapod 6-axis parallel robotic stages, air bearing motion systems, Gantry Systems, 3D printing, laser machining, and piezoelectric nano-positioning solutions. Applications include photonics, semiconductor technology, medical engineering, assembly, inspection,
Discover how PI (Physik Instrumente) LP can support your automation journey with their complete range of solutions and expertise.
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PI is a leading manufacturer of precision motion control and automation systems, hexapod 6-axis parallel robotic stages, air bearing motion systems, Gantry Systems, 3D printing, laser machining, and piezoelectric nano-positioning solutions. Applications include photonics, semiconductor technology, medical engineering, assembly, inspection,
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