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PI is a leading manufacturer of precision motion control and automation systems, hexapod 6-axis parallel robotic stages, air bearing motion systems, Gantry Systems, 3D printing, laser machining, and piezoelectric nano-positioning solutions. Applications include photonics, semiconductor technology, medical engineering, assembly, inspection,

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5-Axis Wafer Stage for Semiconductor Processing, Multi-Axis Air Bearing

POSTED 02/14/2022

Learn more More on Multi-Axis Positioning and Automation Systems:

The 5-axis wafer stage by air bearing manufacturer and supplier P I USA provides the precision and performance required in semiconductor front-end/back-end processes (wafer processing operation and assembly process). Its low profile design allows for easy integration.

Applications of the 5-axis air bearing stage include:

    Multi-Axis indexing, positioning
    Wafer/substrate test and inspection
    Scanning, metrology
    ACS based alignment solutions for production test and packaging needs
    Direct-write lithography
    µLED fabrication
    Clean room applications

The multi-axis nanopositioning system is based on an A-311 planar XY-air bearing stage with long travel range up to 300mm and a special low-profile 3-axis Z-Tip-Tilt stage. The multi-axis positioning stage is operated by an idustrial 6-axis high precision motion controller.

Market Intelligence News & Insights:

North American Robot Orders Hold Steady in Q1 2025 as A3 Launches First-Ever Collaborative Robot Tracking

Robot orders in North America remained essentially flat in the first quarter of 2025, with companies purchasing 9,064 units valued at $580.7 million, according to new data released by the Association for Advancing Automation (A3). Compared to Q1 2024, this represents a 0.4% increase in units ordered and a 15% rise in order value, signaling continued demand and increased investment in higher-value automation systems.