Videos
High Performance Multi-Axis Wafer Inspection Stage, 3-Axis Air Bearing and 5-Axis Piezo Stage
Video shows combination of an air bearing gantry-type XY stage with rotary table and 5-axis piezo nanopositioning stage for multi-axis wafer inspection. Combination of different technologies provides highest accuracy, speed and throughput. Air bearings, linear motors, torque motors, piezo motors and piezo nanopositioning actuators. Application in semiconductor manufacturing, inspection, metrology, etc. High performance EtherCat-based motion controller.
PI (Physik Instrumente) LP
PI is a leading manufacturer of precision motion control and automation systems, hexapod 6-axis parallel robotic stages, air bearing motion systems, Gantry Systems, 3D printing, laser machining, and piezoelectric nano-positioning solutions. Applications include photonics, semiconductor technology, medical engineering, assembly, inspection,
Discover how PI (Physik Instrumente) LP can support your automation journey with their complete range of solutions and expertise.
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PI is a leading manufacturer of precision motion control and automation systems, hexapod 6-axis parallel robotic stages, air bearing motion systems, Gantry Systems, 3D printing, laser machining, and piezoelectric nano-positioning solutions. Applications include photonics, semiconductor technology, medical engineering, assembly, inspection,