Videos
6-DOF Nano-positioning Motion System for Photonics Alignment / Packaging and Prcision 6-Axis Motion
POSTED 12/28/2020
6-Axis highly precise motion from a flexure guide piezo-driven integrated nano-positioning stage. Ultra-precise motion is made possible by the capacitive position sensors providing feedback to a closed-loop motion controller. Applications in photonics packaging, Silicon Photonics, optics alignment, camera lens alignment.