InnerVision® X-Ray Measurement Systems

Features

• Non-Destructive Measurements of Internal Geometries
• XY Measuring Range Options:
  • 710 mm x 660 mm (28" x 24")
  • 1270 mm x 915 mm (50" x 36")
• High-Speed (500 mm/s) Translation using Linear Motors
• 2D Measurements with CNC and Manual Operation
• Ø5 µm Spot Size, 20 - 90 kV X-Ray Source for High-Resolution Images
• Stable Granite Base Ensures High Accuracy and Repeatability
• Ergonomic Workstation for Simple and Convenient Operation
• Advanced, Feature-Rich MetLogix^® M3 Metrology Control Software
• Optional Accessories for Added Functionality and Flexibility
  • Hinged Polycarbonate Platen to Retain Thin Electronics
  • Radiation Meter to Monitor X-Ray Leakage
  • Calibration Grid to Ensure Accuracy and Orthogonality

Thorlabs' InnerVision^® X-Ray Measurement Systems are robust coordinate measuring systems that utilize an X-ray source to measure and locate internal or surface-level features of electronics or other small devices. Automated protocols enable inspection of large volumes of parts sequentially or simultaneously. With tolerance reports and export utilities, thresholds can be set to enable timely corrections to a production process or, when necessary, interruption of production to minimize scrap.

Each metrology system is supported by a granite base to provide the utmost measurement stability. Balanced, non-contact, magnetic linear motors with air bearings are used to position the XY stage quickly, quietly, and accurately. The system's X-ray source, located under the polycarbonate stage platform, has a Ø5 µm spot size at 4 W of electrical power and a 20 kV to 90 kV voltage range (maximum electrical power of 8 W). This can easily penetrate common circuit board materials such as copper and fiberglass up to 0.5" thick, in addition to a variety of plastics and composites with lower X-ray scattering. An X-ray collection path is cantilevered with granite support over the stage. This includes a radiation shield and a 1.5 MP CMOS flat panel detector to collect, process, and record the transmission signal through the sample.