HEIDENHAIN’s New Modular Angle Encoders for Semiconductor Measurement and Metrology
SCHAUMBURG, IL – HEIDENHAIN announces a new series of angle encoders called the ERP 1000 with the design criteria of exceptionally high resolution, high speed, and high contamination resistance. These new unique encoders are particularly useful for highly accurate measurement and positioning applications within semiconductor and metrology equipment.
Consisting of a glass disk bonded to a hub and a scanning unit that scans the fine graduation on the surface of the disk, these ERP 1000s are offered with four different size disks and segments. The disks can have up to 63,000 lines with accuracy to +/- 0.9 arc seconds and up to 2600 RPM. A reference mark is included, and multiple scanning units could be used to increase accuracy even further.
The scanning units also have the new custom ASIC HSP 1.0 which is HEIDENHAIN Signal Processing and forces the stabilization of the signals through an advanced LED brightness control. When the scanning unit detects contamination, the LED intensity is increased to help increase the reflectivity and therefore reducing amplified noise. The end result is a super stable encoder output that ensures high reliability. The scanning unit cable exit can also be ordered with either a straight-out configuration, or a 90-degree exit, both having left or right options as well, so squeezing into tight spaces is possible.
The scanning units come with either an analog 1Volt peak to peak or TTL electrical interface. The TTL versions can have up to 1000x interpolation, yielding an unprecedented 252 million counts of resolution per 360 degrees on the largest disk.
DR. JOHANNES HEIDENHAIN GmbH, headquartered in Traunreut, Germany, develops and supports motion control feedback solutions for the machine tool, semiconductor, electronics assembly and test, metrology, automation, medical, energy, biotechnology and other global markets. HEIDENHAIN employs approximately 6,000 people worldwide in its core business activities. The North American subsidiary is HEIDENHAIN CORPORATION, headquartered in Schaumburg, IL, and San Jose, CA, and has been serving the U.S. industry for over 50 years. www.heidenhain.us