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PI is a leading manufacturer of precision motion control and automation systems, hexapod 6-axis parallel robotic stages, air bearing motion systems, Gantry Systems, 3D printing, laser machining, and piezoelectric nano-positioning solutions. Applications include photonics, semiconductor technology, medical engineering, assembly, inspection, materials handling, and bio-nanotechnology. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagneti

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5-Axis Wafer Stage for Semiconductor Processing, Multi-Axis Air Bearing

POSTED 02/14/2022

The 5-axis wafer stage provides the precision and performance required in semiconductor front-end/back-end processes (wafer processing operation and assembly process).  Its low profile design allows for easy integration.

Applications of the 5-axis air bearing stage include:

    Indexing, positioning
    Wafer/substrate test and inspection
    Scanning, metrology
    ACS based alignment solutions for production test and packaging needs
    Direct-write lithography
    µLED fabrication
    Clean room applications

The multi-axis nanopositioning system is based on an A-311 planar XY-air bearing stage with long travel range up to 300mm and a special low-profile 3-axis Z-Tip-Tilt stage.   The multi-axis positioning stage is operated by an idustrial 6-axis high precision motion controller.  

The 5-axis system in motion can be seen in this video at the SPIE 2022 Photonics West Conference.

See more nanopositioning products for semiconductor manufacturing.